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Classes Taught

• EGRE 522 Microelectromechanical Systems
• EGRE 436 Advanced Semiconductor Fabrication
• EGRE 435 Semiconductor Processes
• ENGR 334 Introduction to Microelectronics Fabrication

Current Projects

• ChemFET Arrays for chemical sensing and the Electronic Nose
• Carbon films and nanotubes for advanced micro devices
• Optical MEMS (MOEMS) for nondestructive evaluation of aircraft and space craft
• PolyMEMS - a plastic MEMS technology using electroactive polymers

Education

• B.S. Electrical Engineering, Cornell University, Ithaca, N.Y., 1980
• M.S. Electrical Engineering, University of California, Berkeley, Calif., 1982
• Ph.D. Electrical Engineering, University of California, Berkeley, Calif., 1985

Patents

• Split Collector Vacuum Field Effect Transistor”; Atkinson, Gary M.; Courtney, M. Duchesne; Pat. No. 5,012,153; April 1991.
• Integrated Circuit Resistor Fabrication Using Focused Ion Beam”; Clark Jr., Willima M.; Atkinson, Gary M.; Lum, Wing Y.; Herring, James R.; Pat. No. 5,047,827; Sept 1991.
• Method of Forming T-Gate Structure on Microelectronic Device Substrate”; Atkinson, Gary M.; Pat No. 5,155,053; Oct 1992.
• 3-D Opto-Electronic System With Laser Inter-Substrate Communication and Fabrication Method”; Kubena, Randall L.; Stratton, Frederic P.; Atkinson, Gary M.; McNulty Jr., Hugh; Ward, James W.; Pat. No. 5,335,243; Aug 1994.
• Fabrication Method for a 3-D Opto-Electronic System With Laser Inter-Substrate Communication”; Kubena, Randall L.; Stratton, Frederic P.; Atkinson, Gary M.; McNulty Jr., Hugh; Ward, James W.; Pat. No. 5,501,822; Mar 1996.
• Single-Wafer Tunneling Sensor and Low Cost IC Manufacturing Method”; Kubena, Randall L.; Atkinson, Gary M.; Pat. No. 5,596,194; Jan 1997.
• Method of Manufacturing Single-Wafer Tunneling Sensor”; Kubena, Randall L.; Atkinson, Gary M.; Pat. No. 5,665,253; Sept 1997.
• Tunneling-Based Rate Gyros With Simple Drive and Sense Axis Coupling”; Kubena, Randall L.; Atkinson, Gary M.; Challoner, Dorian; Sunada, Wallace; Pat. No. 5,756,895; May 1998.
• Tunneling Rotation Sensor”; Kubena, Randall L.; Atkinson, Gary M.; Challoner, Dorian; Sunada, Wallace; Pat. No. 5,905,202; May 1999.

Publications

• G.M. Atkinson, “Masked Ion Beam Lithography Simulator,” FORTRAN Module for the Simulation and Modeling of Photolithography and Etching (SAMPLE), UC Berkeley, Dec 1984.
• G.M. Atkinson and N.W. Cheung, “The Effects of Mask Scattering on Photoresist Profiles in Masked Ion Beam Lithography,” Nucl. Inst. Meth. Phys. Res., Vol. B7, Jan/Feb 1985.
• G.M. Atkinson and A.R. Neureuther, “Simulation of Mask Scattering Effects in Masked Ion Beam Lithography,” J. Vac. Sci. Technol. B, Vol. 3, No. 1, Jan/Feb 1985.
• G.M. Atkinson, “Simulation of Developed Resist Profiles for Masked Ion Beam Lithography,” Memorandum No. UCB/ERL M85/51, University of California, Berkeley, June 1985.
• G.M Atkinson, J.L. Bartelt and P.L. Middleton, “A Minimum Step Fabrication Process for the All-Silicon Channeling Mask,” J. Vac. Sci. Technol. B, Vol. 5, No. 1, Jan/Feb 1987.
• G.M. Atkinson, J.L. Bartelt, A.R. Neureuther and N.W. Cheung, “The Characterization and Optimization of Masked Ion Beam Lithography Using <100> Silicon Channeling Masks,” J. Vac. Sci. Technol. B, Vol. 5, No. 1, pp 232-235, Jan/Feb 1987.
• R.L. Kubena, F.P. Stratton, J.W. Ward, G.M. Atkinson and R.J. Joyce, “Sub-20-hm-wide Line Fabrication in Poly(methylmethacrylate) Using a Ga+ Microprobe,” J. Vac. Sci. Technol. B, Vol. 7, No. 6, pp 1798-1802, Nov/Dec 1989.
• R.L. Kubena, F.P. Stratton, R.J. Joyce, G.M. Atkinson and J.W. Ward, “A Low Magnification FIB System with 8 hm Spot Size,” J. Vac. Sci. Technol. B, Vol. 9, No. 6, Nov/Dec 1991.
• G.M. Atkinson, R.L. Kubena, L.E. Larson, L.D. Nguyen, F.P. Stratton, L.M. Jelloian, M.V. Le and H. McNulty, “Self-Aligned HEMT Gate Fabrication Using Focused Ion Beams,” J. Vac. Sci. Technol. B, Vol. 9, No. 6, Nov/Dec 1991.
• F.P. Stratton, J.W. Ward, R.L. Kubena, G.M. Atkinson, R.J. Joyce and H. McNulty, “FIB Micromachining of Optoelectronic Structures With Complex Geometries,” Proceedings of the Government Microcircuit Applications Conference (GOMAC), Nov 1992.
• G.M. Atkinson, F.P. Stratton and R.L. Kubena, “30 hm Resolution Zero Proximity Lithography on High Z Substrates,” J. Vac. Sci. Technol. B, Vol. 10, No. 6, Nov/Dec 1992.
• R.L. Kubena, G.M. Atkinson and F.W. Hardy, “Proposal for Advanced Tactical Intertial Measurement Unit,” Submitted and Awarded by the United States Air Force, Eglin AFB, April 1995.
• R.L. Kubena, G.M. Atkinson, W.P. Robinson and F.P. Stratton, “A New Miniaturized Surface Micromachined Tunneling Accelerometer,” Elect. Dev. Let., Vol. 17, No. 6, June 1996.
• R.L. Kubena, G.M. Atkinson, W.P. Robinson and F.P. Stratton, “A New Miniaturized Surface Micromachined Tunneling Accelerometer,” J. Vac. Sci. Technol. B, Vol. 14, No. 6, Nov/Dec 1996.
• Pearson R.E., Palmer M. A. and Atkinson G. M., “Exposing Freshman to Microelectronics Fabrication as Part of an Innovative Materials Science,” Proceedings of the Fourteenth Biennial University Government Industry Microelectronics Symposium, Richmond, VA, June, 2001.
• W.C. Wilson and G.M. Atkinson, “Geometrical Matrix Toolbox for Modeling of a MOEMS System,” submitted to IEEE Journal on Education, April 2003.
• R.E. Pearson and G.M. Atkinson, “Teaching Vacuum Technology Using Spreadsheet Calculations,” Proceedings of the 15th Annual University/ Government/Industry Microelectronics Symposium, June 2003.
• G.M. Atkinson, W.C. Wilson, R.E. Pearson, Z. Ounaies, J.S. Harrison, C. Park and J.A Midkiff, “Piezoelectric Polyimide MEMS Process,” Proceedings of the NASA VLSI Symposium, May 2003.
• G.M. Atkinson, R.E. Pearson, Z. Ounaies, J.S. Harrison, C. Park, S. Dogan, and J.A Midkiff, “Piezoelectric Polyimide Tactile Sensor,” Proceedings of the 15th Annual University/Government/Industry Microelectronics Symposium, June 2003.
• G.M. Atkinson, R.E. Pearson, Z. Ounaies, J.S. Harrison, C. Park, S. Dogan, and J.A Midkiff, “Novel Piezoelectric Polyimide MEMS,” Proceedings of the 12th Annual Conference on Solid-State Sensors, Actuators and Microsystems, June 2003.

Research Topics

• Microelectromechanical Systems (MEMS)
• Biochips
• Sensors and Actuators
• Smart Materials
• Micro/Nano Fabrication